Patent · US Active

Metal N-aminoguanidinate complexes for use in thin film fabrication and catalysis

US10093687B2 · kind B2 · utility

4Cited by
0References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 25, 2015
Grant dateOct 9, 2018
Priority date
Expiry dateNov 25, 2035

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45553
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

The present patent application relates to new metal complexes having at least one N-aminoguanidinate ligand. The patent application further relates to the preparation of the new metal complexes and also to their use. The new metal complexes are especially suitable as precursors for the preparation of functional layers by means of gas-phase thin-film processes such as CVD, MO-CVD, MOVPE and ALD. Additionally, they are also suitable as catalysts for olefin hydroamination and for olefin polymerization.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.