Detection device and detection method
US10094653B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 20, 2017 |
| Grant date | Oct 9, 2018 |
| Priority date | — |
| Expiry date | Jun 20, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2009/0238
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a detection device and a detection method. The detection device comprises a light source module, a receiving module, an image generation module and a judgment module. The light source module is configured to emit light towards a film at a predetermined angle, the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film, the image generation module is configured to generate an equal thickness interference fringe image according to the interference light, and the judgment module is configured to judge whether thickness of the film is uniform according to the equal thickness interference fringe image. The detection device can perform high accuracy detection on uniformity of the thickness of a film, thereby facilitating improving display quality of a display panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.