Patent · US Active

Substrate holder for graphene film synthesis

US10100402B2 · kind B2 · utility

0Cited by
9References
8Claims
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Assignee

Inventors

Key dates

Filing dateOct 7, 2011
Grant dateOct 16, 2018
Priority date—
Expiry dateJun 21, 2035

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y40/00
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An apparatus and method for graphene film synthesis. The apparatus includes a quasi enclosed substrate holder which includes one open side, a cap disposed over the one open side of the quasi enclosed substrate holder, and a substrate for graphene film synthesis located inside the quasi enclosed substrate holder. The method includes placing a substrate for graphene film synthesis inside of a quasi enclosed substrate holder and generating a graphene film on the substrate via chemical vapor deposition, wherein the quasi enclosed substrate holder includes one open side and a cap disposed over the open side of the quasi enclosed substrate holder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.