Thermal flow sensor for determining a gas or the composition of a gas mixture as well as its flow velocity
US10101285B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2014 |
| Grant date | Oct 16, 2018 |
| Priority date | — |
| Expiry date | Jun 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flow sensor for determining a gas or the composition of a gas mixture as well as its flow velocity, comprising: a substrate onto which at least a first dielectric layer is applied; at least one heating structure that is applied onto the first dielectric layer and serves to heat the gas or the gas mixture; at least a first temperature sensor element that is applied onto the first dielectric layer at a distance from the heating structure and captures the temperature of the gas or gas mixture heated at the heating structure; a control device that controls the heating structure in a first operating mode in such a way that the heating structure shows a predetermined temperature, and controls the heating structure in a second operating mode in such a way that a power input into the heating structure corresponds to a predetermined power; and an evaluation unit which determines at least one physical characteristic of the gas present or the gas mixture on the basis of the operating modes and determines the gas present or the composition of the gas mixture as well as its flow velocity on the basis of this physical characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.