On-chip reference electrode for biologically sensitive field effect transistor
US10101295B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2016 |
| Grant date | Oct 16, 2018 |
| Priority date | — |
| Expiry date | Jan 19, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/67
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device including a biosensor with an on-chip reference electrode embedded within the semiconductor device, and associated manufacturing methods are provided. In some embodiments, a pair of source/drain regions is disposed within a device substrate and separated by a channel region. An isolation layer is disposed over the device substrate. A sensing well is disposed from an upper surface of the isolation layer overlying the channel region. A bio-sensing film is disposed along the upper surface of the isolation layer and extended along sidewall and lower surfaces of the sensing well. A reference electrode is disposed vertically between the bio-sensing film and the isolation layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.