Patent · US Active

Device for treating a disc-shaped substrate and support adapter

US10101672B2 · kind B2 · utility

0Cited by

3References

21Claims

0Family size

Assignee

SUSS MICROTEC LITHOGRAPHY GMBH · DE

Inventors

Sven Hansen · Hamburg, DE
Henrik Petry · Garching bei München, DE

Key dates

Filing date	May 27, 2016
Grant date	Oct 16, 2018
Priority date	—
Expiry date	Nov 10, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/682
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for treating a disc-shaped substrate is disclosed, comprising a support which has a support face for the disc-shaped substrate and a support adapter which can be coupled to the support and can support a mask used for treating the disc-shaped substrate, wherein an interface is provided which detects the coupling of the support adapter to the support and wherein a control system is provided which cooperates with the interface and detects whether the support adapter is coupled to the support, in particular whether the interface is occupied. A support adapter for use in a device of this type is further disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.