Electro-mechanical transduction element, manufacturing method of manufacturing electro-mechanical transduction element, droplet discharge head, and droplet discharge device
US10103315B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 2015 |
| Grant date | Oct 16, 2018 |
| Priority date | — |
| Expiry date | Jun 25, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electro-mechanical transduction element includes a lower electrode formed above a substrate; an electro-mechanical transduction film which is formed on the lower electrode and includes a perovskite-type crystal containing lead zirconate titanate (PZT); and an upper electrode formed on the electro-mechanical transduction film, wherein, in a state where the electro-mechanical transduction film is not bound by the substrate, a peak position of X-ray diffraction caused by a plane (200) of the electro-mechanical transduction film is 2θ=44.45° or greater and 44.75° or smaller, and a peak of diffraction caused by the plane (200) or a plane (400) of the electro-mechanical transduction film has an asymmetry property.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.