Patent · US Active

Fabrication of multilayer nanograting structures

US10103357B2 · kind B2 · utility

0Cited by
2References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 7, 2017
Grant dateOct 16, 2018
Priority date
Expiry dateFeb 7, 2037

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y40/00
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.