Method for producing a soot sensor with a laser beam

US10107221B2 · kind B2 · utility

Assignee

• Heraeus Sensor Technology GmbH · DE

Inventors

• Karlheinz Wienand · Aschaffenburg, DE
• Matsvei Zinkevich · Goldbach, DE
• Dieter Teusch · Bruchköbel, DE

Key dates

• Filing date: Feb 28, 2014
• Grant date: Oct 23, 2018
• Expiry date: Mar 11, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K13/024
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for producing a soot sensor is provided. The method includes steps of applying a contiguous metallic layer on an electrically insulating substrate and structuring the metal coating with a laser beam by vaporizing areas of the metallic layer. At least two interlaced contiguous electrically conductive structures are produced. The electrically conductive structures are spatially separated from one another with the laser beam and are electrically insulated from one another such that the conductive structures substantially extend next to one another and close to one another in an area relative to a total length thereof. A soot sensor produced using such a method is also provided. The soot sensor has an electrically insulating substrate and at least two contiguous electrically conductive structures which are spatially separated from one another and are interlaced as structured metallic layers. An intermediate space between the conductive structures is burned free with a laser.