Method and device for estimating optical properties of a sample

US10107745B2 · kind B2 · utility

Assignees

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR
• CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
• Universite Pierre Et Marie Curie (Paris 6) · FR

Inventors

• Veronica SORGATO · Quito, EC
• Michel Berger · Pont-à-Mousson, FR
• Anne Planat-Chretien · St-Estève, FR
• Christine Vever-Bizet · Paris, FR
• Genevieve Bourg-Heckly · Paris, FR
• Charlotte Emain · Izeaux, FR

Key dates

• Filing date: Apr 21, 2017
• Grant date: Oct 23, 2018
• Expiry date: Apr 21, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/088
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and a device allow optical properties of a sample to be estimated. The method includes the illumination of the sample by a first light source, and the formation of an image of the sample thus illuminated, on the basis of which a first optical property is estimated, at various points on a surface of the sample. The method also includes measuring an auxiliary optical property of the sample and estimating the first optical property, taking account of the auxiliary optical property measured on the sample.