Multistage sensing device
US10113925B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2016 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | Apr 15, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor element that are disposed in the deformable unit. The first sensor element is disposed between the second sensor element and the substrate. The second sensor element is operable to measure deformation of the second body when an external force is applied to the deformable unit. The first sensor element is operable to measure deformation of the first body when the first body is deformed by the deformation of the second body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.