Ceramic sensor module including diaphragm and cylindrical portion integrated with the diaphragm
US10113926B2 · kind B2 · utility
1Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 2017 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | Jul 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical quantity measuring sensor includes: a joint having a projection; a ceramic sensor module including a diaphragm and a cylindrical portion integrated with the diaphragm and provided to the projection; and an O-ring interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.