Method and device for non-contact detection of thin medium
US10113976B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2015 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | Jul 8, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG07D7/189
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and device for non-contact detection of a thin medium (5) is disclosed. The device comprises a light source (1), an optical splitter (2), a reference plane (3), a linearly arrayed photoelectric detector (6), a signal processing module (4) and the thin medium (5). The method involves the following steps: acquiring time for targeted light which is emitted by the light source (1) and reflected by the thin medium (5) to the linearly arrayed photoelectric detector (6), and acquiring time for reference light which is emitted by the light source (1) and reflected by the reference plane (3) to the linearly arrayed photoelectric detector (6); according to the acquired time that the targeted light and the reference light arrive at the linearly arrayed photoelectric detector (6), computing a first optical path and a second optical path corresponding to the targeted light and the reference light respectively, and acquiring quantity of bright fringes and dark fringes of interference fringes according to a predetermined computing manner by the signal processing module (4); conducting difference comparison between the quantity of the bright fringes and dark fringes of the interference fr…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.