Patent · US Active

Low drift reference for laser radar

US10119816B2 · kind B2 · utility

6Cited by

14References

21Claims

0Family size

Assignee

NIKON METROLOGY NV · BE

Inventors

Anthony R. Slotwinski · Salem, US
Mina Rezk · Haymarket, US

Key dates

Filing date	Mar 15, 2013
Grant date	Nov 6, 2018
Priority date	—
Expiry date	Mar 19, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01S17/89
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.