Gas insensitive mass flow control systems and methods
US10126761B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2016 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Jan 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/17
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Gas insensitive systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. The method includes producing, in a secondary conduit, an assessment flow that has a changing pressure; calculating a first measure of a flow rate of the assessment flow based upon a rate-of-change of the pressure of the assessment flow; and measuring the assessment flow with a mass flow meter that is affected by the composition of the gas to produce a second measure of the assessment flow. An adjustment signal is generated based upon a difference between the first measure and the second measure, and a gas-corrected flow signal is generated by adjusting a measured-flow signal of a mass flow controller with the adjustment signal. The gas-corrected flow signal is used by the mass flow controller to control a flow rate of the gas through the primary conduit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.