MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
US10128079B2 · kind B2 · utility
1Cited by
18References
20Claims
0Family size
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Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Jan 7, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.