Bulk acoustic wave (BAW) resonator structure
US10128813B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2016 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Nov 12, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/582
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave (BAW) resonator comprises: a first electrode; a second electrode comprising a plurality of sides, wherein at least one of the sides is a connection side; a piezoelectric layer disposed between the first and second electrodes, and an acoustic reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, wherein an overlap of the reflective element, the first electrode, the second electrode, and the piezoelectric layer defines an active area of the acoustic resonator; a bridge adjacent to a termination of the active area of the BAW resonator; and a discontinuity disposed in the bridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.