Ionizing pump stage
US10132339B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 13, 2013 |
| Grant date | Nov 20, 2018 |
| Priority date | — |
| Expiry date | Jan 25, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.