Patent · US Active

Ultraviolet sensor having filter

US10132679B2 · kind B2 · utility

1Cited by
7References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 23, 2014
Grant dateNov 20, 2018
Priority date
Expiry dateApr 12, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F77/331
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Techniques are provided to furnish a light sensor that includes a filter positioned over a photodetector to filter visible and infrared wavelengths to permit the sensing of ultraviolet (UV) wavelengths. In one or more implementations, the light sensor comprises a semiconductor device (e.g., a die) that includes a substrate. A photodetector (e.g., photodiode, phototransistor, etc.) is formed in the substrate proximate to the surface of the substrate. In one or more implementations, the substrate comprises a silicon on insulator substrate (SOI). A filter (e.g., absorption filter, interference filter, flat pass filter, McKinlay-Diffey Erythema Action Spectrum-based filter, UVA/UVB filter, and so forth) is disposed over the photodetector. The filter is configured to filter infrared light and visible light from light received by the light sensor to at least substantially block infrared light and visible light from reaching the photodetector. The thickness of the SOI substrate can be tailored to modify received UV/visible wavelength ratios.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.