Multi-element sensor array calibration method
US10132906B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2016 |
| Grant date | Nov 20, 2018 |
| Priority date | — |
| Expiry date | Sep 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/9086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of calibrating a sensor array having elements spaced from one another in a first direction, the array defining an array spatial response function, includes: providing a test workpiece having at least first and second calibrated defects spaced apart in the first direction by a characteristic distance such that when the first calibrated surface defect is located at a position corresponding to an array response function maximum, the second calibrated surface defect is located at a position corresponding to an array response function minimum; passing the array across the first and second calibrated surface defects in a direction normal to the first direction and determining a peak sensor signal from at least two of the elements in the array to determine an array spatial response function root mean squared average; and setting a rejection threshold as a predetermined proportion of the array spatial response function root mean squared average.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.