Method for manufacturing a germanium slow light waveguide and photodiode incorporating this slow light waveguide
US10132998B2 · kind B2 · utility
1Cited by
4References
8Claims
0Family size
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Key dates
| Filing date | Jul 26, 2017 |
| Grant date | Nov 20, 2018 |
| Priority date | — |
| Expiry date | Jul 26, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/60
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This method for manufacturing a germanium slow light waveguide includes:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.