Coating device and washing method for its nozzle
US10137469B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Sep 2, 2016 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | Sep 2, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B5/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A coating device and a washing method for its nozzle are provided. The coating device including a barrel, a nozzle connected with the barrel, and a waste sump provided below the nozzle, wherein the coating device further includes a washing bath and a washing component, the washing bath is provided at a side of the waste sump, and the washing component is provided in the washing bath, and is configured to inject washing liquid and cleaning gas to the nozzle to wash the nozzle when the nozzle is moved to the top of the washing bath.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.