Patent · US Active

Asymmetric sensor

US10139270B2 · kind B2 · utility

2Cited by
0References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 7, 2011
Grant dateNov 27, 2018
Priority date
Expiry dateJun 23, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N30/306
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An asymmetric sensor having asymmetric electrodes and/or being asymmetrically anchored provides enhanced sensitivity. In example embodiments, part of the electrode on a sensor is etched or removed resulting in enhanced mass-change sensitive resonant modes. In another example embodiment, a sensor is anchored asymmetrically, also resulting in enhanced mass-change sensitive resonant modes. By asymmetrically anchoring a piezoelectric portion of a sensor, resonant bending modes of the sensor can be measured electrically without external instrumentation. Modifying the electrode of a piezoelectric cantilever enables expression of mass-change sensitive resonant modes that normally do not lend themselves to electrical measurement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.