Asymmetric sensor
US10139270B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2011 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | Jun 23, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An asymmetric sensor having asymmetric electrodes and/or being asymmetrically anchored provides enhanced sensitivity. In example embodiments, part of the electrode on a sensor is etched or removed resulting in enhanced mass-change sensitive resonant modes. In another example embodiment, a sensor is anchored asymmetrically, also resulting in enhanced mass-change sensitive resonant modes. By asymmetrically anchoring a piezoelectric portion of a sensor, resonant bending modes of the sensor can be measured electrically without external instrumentation. Modifying the electrode of a piezoelectric cantilever enables expression of mass-change sensitive resonant modes that normally do not lend themselves to electrical measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.