Physical quantity detection apparatus, measurement system, and measurement apparatus
US10139308B2 · kind B2 · utility
8Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 2016 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | May 24, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detecting element unit of a physical quantity detection apparatus includes a detection part and a supporting part. The detection part has a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and the supporting part includes a fixing portion to be fixed to a base for supporting the base part. A processing unit of the physical quantity detection apparatus extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.