Colour sensor with angle-selective structures

US10139339B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Wladimir Tschekalinskij · Nuremberg, DE
• Stephan Junger · Bubenreuth, DE
• Nanko Verwaal · Herzogenaurach, DE
• Norbert Weber · Pocking, DE

Key dates

• Filing date: May 22, 2017
• Grant date: Nov 27, 2018
• Expiry date: May 22, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/27
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention relates to a color sensor having at least one photosensitive element, in front of which a layer stack of dielectric layers and structured metal layers is constructed, and at least one color filter, through which optical radiation incident on a light input side of the color sensor is filtered before it reaches a photosensitive surface of the photosensitive element. In the suggested color sensor, an array of angle-selective passageways is provided for the optical radiation between the light input side and the photosensitive surface, and each passageway only allows parts of the optical radiation incident on the light input side of the color sensor within a limited angle of incidence range relative to an axis extending perpendicularly to the colour filter to pass through to the photosensitive surface. When the color sensor is manufactured with semiconductor technology, it enables the angle-selective structures to be integrated in the CMOS layer stack. In this way, ultra-flat color sensors can be made.