BHF solution concentration measurement device and BHF solution concentration measurement method
US10139363B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 19, 2016 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | Feb 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to make it possible to accurately measure the HF concentration in a BHF solution in a low concentration region using a simple structure, there are provided a relationship storage unit that stores relationships between a pH of a BHF solution and an HF concentration, a pH meter that measures the pH of the BHF solution, and a concentration calculation unit that refers to relationships stored in the relationship storage unit, and calculates the HF concentration from the pH values measured by the pH meter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.