Alignment film detecting device and alignment film detecting method
US10139656B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 14, 2016 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | May 24, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides in some embodiments an alignment film detecting device including: an imaging unit configured to obtain image information of the alignment grooves on the alignment film of the substrate; and an image processing unit configured to determine whether there is a defect in the alignment grooves on the alignment film based on the image information. According to the alignment film detecting device and the alignment film detecting method provided the present disclosure, the defect of the alignment film on the substrate may be detected, and the image information of the alignment grooves on the alignment film of the substrate may be obtained by the imaging unit, and a recognizing process may be implemented by the image processing unit based on the image information, so that it may accurately determine whether there is a defect in the alignment grooves. As compared with a method of manually detecting the defect in the alignment grooves by vapor in a conventional alignment film detecting technique, it may overcome disadvantages of manually detecting the defect in the alignment grooves of the substrate, such as low recognition rate, being vulnerable to false detec…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.