Patent · US Active

Method for examining a gas by mass spectrometry and mass spectrometer

US10141174B2 · kind B2 · utility

4Cited by

9References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michel Aliman · Oberkochen, DE
Alexander Laue · Heidenheim, DE
Hin Yiu Anthony Chung · Blaustein, DE
Gennady Fedosenko · Aalen, DE
Ruediger Reuter · Aalen, DE
Leonid Gorkhover · Ulm, DE
Martin Antoni · Aalen, DE
Andreas Gorus · Oberkochen, DE
Valerie Derpmann · Aalen, DE

Key dates

Filing date	Oct 27, 2017
Grant date	Nov 27, 2018
Priority date	—
Expiry date	Oct 27, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J49/027
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.