Thin-film-transistor, thin-film-transistor array substrate, fabricating methods thereof, and display panel
US10141340B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Dec 10, 2015 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | Dec 10, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D99/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with some embodiments of the disclosed subject matter, a TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate; performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer and a non-oxidized conductive sub-layer; and forming an active layer, a source electrode and a drain electrode over the oxidized insulating sub-layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.