Methods for reducing deposits in ingot puller exhaust systems
US10145023B2 · kind B2 · utility
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2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2015 |
| Grant date | Dec 4, 2018 |
| Priority date | — |
| Expiry date | Jul 17, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Production of silicon ingots in a crystal puller that involve reduction in the formation of silicon deposits on the puller exhaust system are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.