Coordinate measuring machine and method for operating a coordinate measuring machine

US10145664B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Guenter Grupp · Donzdorf, DE
• Ralf Bernhardt · Aalen, DE
• Klaus Bendzulla · Künzelsau, DE
• Gerd Moser · Mindelheim, DE

Key dates

• Filing date: Oct 17, 2016
• Grant date: Dec 4, 2018
• Expiry date: Apr 16, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/37193
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A coordinate measuring machine including a workpiece support for mounting a workpiece to be measured; a mechanism for moving a sensor in a first coordinate direction and a second coordinate direction perpendicular thereto. The mechanism includes: a first measurement slide guided in the first coordinate direction along two parallel guides arranged on opposite sides of the workpiece support. The first measurement slide spans the support. The first slide is driven via a first drive, which drives the first slide along a first guide of the guides, and is driven via a second drive, which drives the first slide along the second of the guides; a second measurement slide guided movably in the second coordinate direction along the first measurement slide. The second slide is assigned a position measuring system, via which the position of the second measurement slide relative to the first measurement slide can be determined; a controller, which actuates the first and second drive. The controller includes a force feedforward control, which, depending on the detected position (xactual) of the second measurement slide and depending on a setpoint acceleration (asetpoint) to be set of the first me…