Optical modulator and method of manufacturing same
US10146070B2 · kind B2 · utility
3Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2016 |
| Grant date | Dec 4, 2018 |
| Priority date | — |
| Expiry date | Feb 2, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical phase modulator 100 according to an embodiment of this disclosure comprises a rib-type waveguide structure 110 comprising: a PN junction 106 comprising Si and formed in a lateral direction on a substrate; and a Si1-xGex layer 108 that is doped with a p-type impurity and comprises at least one layer laminated on the PN junction 106, so as to be electrically connected to the PN junction 106.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.