High efficacy seal for organic light emitting diode displays
US10147906B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2015 |
| Grant date | Dec 4, 2018 |
| Priority date | — |
| Expiry date | Feb 6, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/8731
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A high efficacy multi-layer seal structure formed on an organic light emitting diode device and the process for depositing the same. A thin film seal is formed over the substrate having OLED layers, and includes a first metallic layer formed over the substrate, an inorganic layer formed over the first metallic layer, and a second metallic layer formed of the inorganic layer. The metallic layers comprise one or more oxide or nitride layers, each oxide or nitride comprising a metal. The inorganic layer comprises a metal oxide, a metal nitride or a metal oxynitride. The process for forming the multi-layer seal structure includes depositing the first metallic layer over the substrate using atomic layer deposition, depositing the inorganic layer over the first metallic layer using sputtering, and then depositing the second metallic layer over the inorganic layer using atomic layer deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.