Method for drying thin films in an energy efficient manner
US10150230B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2012 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | Sep 1, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/1283
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method for drying a thin film stack having a thin film located on a substrate is disclosed. The thin film stack is conveyed past a flashlamp during which the thin film stack is irradiated with a composite light pulse from the flashlamp. The composite light pulse is composed of multiple micropulses. The time duration of the composite light pulse is shorter than a total thermal equilibration time of the thin film stack. In addition, when the thin film stack is being conveyed past the flashlamp, the thin film stack should move less than 10% of the length of the irradiating area in the conveyance direction during the delivery of the composite light pulse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.