Microelectromechanical systems (MEMS) stopper structure for stiction improvement
US10150664B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Dec 15, 2014 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | Dec 24, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D48/50
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A microelectromechanical systems (MEMS) structure having a stopper integrated with a MEMS substrate is provided. A first substrate has a dielectric layer arranged over the first substrate. The dielectric layer includes a device opening. A second substrate is arranged over and bonded to the first substrate through the dielectric layer. The second substrate includes a deflectable element arranged over the device opening. A stopper is integrated with the second substrate and protrudes from the deflectable element over the device opening. A method for manufacturing the MEMS structure is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.