Patent · US Active

Helmholtz coil assisted PECVD carbon source

US10151025B2 · kind B2 · utility

0Cited by

15References

10Claims

0Family size

Assignee

Seagate Technology LLC · US

Inventors

Christopher L. Platt · Erie, US
Zhaohui Fan · Fremont, US
Samuel Lewis Tanaka · San Leandro, US
Chun Wai Joseph Tong · San Jose, US
Thomas Larson Greenberg · Berkeley, US
Xiaoding Ma · Fremont, US

Key dates

Filing date	Jul 31, 2014
Grant date	Dec 11, 2018
Priority date	—
Expiry date	Dec 30, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32669
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.