Bolometer, method of fabricating the same, and bolometric method
US10151638B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2016 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | Aug 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.