Quantitative analysis device for trace carbon and quantitative analysis method for trace carbon
US10151718B2 · kind B2 · utility
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1References
17Claims
0Family size
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Key dates
| Filing date | Mar 23, 2015 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | May 16, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2813
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units for detecting characteristic x-rays of carbon in the sample are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.