Proportional integral derivative control incorporating multiple actuators

US10152033B2 · kind B2 · utility

Assignee

• Varian Semiconductor Equipment Associates, Inc. · US

Inventors

• Jack J. LoPiccolo · Gloucester, US
• Robert J. Mitchell · Winchester, US

Key dates

• Filing date: Mar 4, 2016
• Grant date: Dec 11, 2018
• Expiry date: Dec 28, 2036

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S901/09
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.