Illumination and imaging device for high-resolution X-ray microscopy with high photon energy

US10153062B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• AXO DRESDEN GMBH · DE

Inventors

• Martin Gall · Kalamazoo, US
• Ehrenfried Zschech · Radebeul, DE
• Reiner Dietsch · Dresden, DE
• Sven Niese · Radebeul, DE

Key dates

• Filing date: Jun 27, 2016
• Grant date: Dec 11, 2018
• Expiry date: Feb 4, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K1/062
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention relates to an illumination and imaging device for high-resolution X-ray microscopy with high photon energy, comprising an X-ray source (1) for emitting X-ray radiation and an area detector (4) for detecting the X-ray radiation. Moreover, the device comprises a monochromatizing and two-dimensionally focussing condenser-based optical system (2) arranged in the optical path of X-ray radiation with two reflective elements (6) being arranged side-by-side for focussing impinging X-ray radiation on an object to be imaged (5) and a diffractive X-ray lens (3) for imaging the object to be imaged (5) on the X-ray detector (4). Typically, the illumination and imaging device is used for performing radiography, tomography and examination of a micro-electronic component or an iron-based material.