Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system
US10157726B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 29, 2011 |
| Grant date | Dec 18, 2018 |
| Priority date | — |
| Expiry date | May 11, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.