Liquid knife cleaning device
US10157754B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 10, 2015 |
| Grant date | Dec 18, 2018 |
| Priority date | — |
| Expiry date | Jan 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/021
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A liquid knife cleaning device is provided, and it includes a splash shield; a liquid knife, which is located under the splash shield; an oblique baffle, which is located between the splash shield and the liquid knife, and a lower side of which is fixedly bonded to the top of a blade of the liquid knife. The oblique baffle can act to isolate the liquid knife and the substrate on the delivery roll from a majority of water vapor, and droplets dripping on the oblique baffle can flow down along a slope of the oblique baffle, and will not drip on the substrate that has not been rinsed by the liquid knife. Effects of droplets on the uniformity of the substrate can be greatly reduced by the present technique, thereby enhancing the product quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.