Patent · US Active

Temperature controller of semiconductor wafer

US10157761B2 · kind B2 · utility

1Cited by
2References
4Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 17, 2016
Grant dateDec 18, 2018
Priority date—
Expiry dateOct 5, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67109
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

A temperature controller for a semiconductor wafer is configured to perform a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to perform a temperature adjustment of the semiconductor wafer, in which a manipulated variable calculator to give a manipulated variable to a master loop and a slave loop includes a master-slave switching unit configured to switch between the master loop and the slave loop and a master-slave cancellation unit configured to cancel a setting of the master loop and the slave loop when a temperature setpoint of the slave loop is set to have a temperature gradient against a temperature setpoint of the master loop.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.