Pressure sensor
US10161821B2 · kind B2 · utility
0Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2018 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Feb 6, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B21/182
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure change measuring unit causes a temperature control unit to operate and vary the temperature of a sensor chip in a predetermined temperature range, and measures changes in pressure value output from the sensor chip whose temperature is being varied. A temperature characteristic calculating unit calculates a temperature characteristic of the sensor chip from changes in the temperature of the sensor chip caused by the operation of the temperature control unit and changes in pressure value measured by the pressure change measuring unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.