Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor
US10161916B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2017 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Aug 22, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ultrasonic sensor which includes a substrate where an opening section is formed, a vibration plate that is provided on the substrate so as to close the opening section, and a piezoelectric element that is layered on a surface of the vibration plate on an opposite side to the opening section and includes a first electrode, a piezoelectric element, and a second electrode, includes a reflection layer that is provided in a space around the piezoelectric element on the surface of the vibration plate on an opposite side to the opening section, to reflect other ultrasonic waves which are transmitted in a different direction from a transmitted ultrasonic wave transmitted to a measuring target side on an interface between the piezoelectric element and the reflection layer, and has a thickness so as to superimpose other ultrasonic waves on the transmitted ultrasonic wave.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.