F-theta photolithographic lenses
US10162151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 28, 2014 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Mar 1, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/359
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An F-θ lens for laser engraving includes a first lens (L1), a second lens (L2), a third lens (L3), and a fourth lens (L4), which are coaxially arranged along a transmission direction of incident light; wherein the first lens (L1) is a meniscus lens, the second lens (L2) is a meniscus lens, the third lens (L3) is a plano-convex lens, and the fourth lens (L4) is a flat lens; wherein the first lens (L1) has a first surface (S1) and a second surface (S2), the second lens (L2) has a third surface (S3) and a fourth surface (S4), the third lens (L3) has a fifth surface (S5) and a sixth surface (S6), and the fourth lens (L4) has a seventh surface (S7) and an eighth surface (S8); the first surface (S1) to the eighth surface (S8) are sequentially arranged along the transmission direction of the incident light; wherein radii of curvature of the first surface (S1) to the eighth surface (S8) are −29 mm, −88 mm, −56 mm, −36 mm, ∞, −116 mm, ∞, and ∞, respectively; and center thicknesses (d1, d2, d3, d4) of the first lens (L1) to the fourth lens (L4) are 3 mm, 6 mm, 6 mm, and 3 mm, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.