Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices
US10164188B2 · kind B2 · utility
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Key dates
| Filing date | Feb 15, 2017 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Feb 15, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
Abstract
A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.