Fully integrated gas concentration sensor
US10168211B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2017 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Dec 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas concentration sensor is includes an integrated die-form electromagnetic radiation source and an integrated die-form infrared detector. In one or more implementations, the gas concentration sensor includes a package substrate defining at least one aperture, a gas permeable mesh coupled to the package substrate and covering at least a portion of the at least one aperture, a die-form electromagnetic radiation source positioned in an interior region of the package substrate, a die-form detector positioned in the interior region of the package substrate, and control circuitry operably coupled to the die-form detector and configured to detect and calibrate one or more signal outputs from the die-form detector to determine a gas concentration within the interior region of the package substrate. The gas concentration sensor can be configured for specific detection of various gases through control of the spectral wavelengths emitted by the electromagnetic radiation source(s) and/or detected by the detector(s).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.