Method of assembly and manufacturing of piezo actuated Fabry-Perot interferometer
US10168214B2 · kind B2 · utility
3Cited by
5References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2016 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Aug 19, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.