Patent · US Active

Uncooled, high sensitivity spectral selective infrared detector

US10168221B2 · kind B2 · utility

0Cited by
3References
17Claims
0Family size

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Inventors

Key dates

Filing dateMar 17, 2017
Grant dateJan 1, 2019
Priority date—
Expiry dateJul 19, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J5/59
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An infrared (IR) detector comprises a radio frequency (RF) resonator including a bottom electrode to provide acoustic excitation, a piezoelectric layer connected to the bottom electrode and suspended over a cavity defined within a semiconductor substrate, and a top layer comprising a mid-IR metamaterial and which is connected to the piezoelectric layer of the RF resonator. The top layer and the piezoelectric layer are sized to impedance match with a particular IR wavelength, to minimize reflection and maximize absorption of a particular IR wavelength, and thus make the top layer polarization sensitive to the particular IR wavelength.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.